Parallel-connected merged-floating-gate nfet-pfet eeprom cell and array

ABSTRACT

A shared floating gate device, the device including an nFET, a pFET including a different material than that of the nFET, and a floating gate.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a Continuation Application of U.S. patentapplication Ser. No. 15/798,448, filed on Oct. 31, 2017, the entirecontents of which are hereby incorporated by reference.

BACKGROUND

The present invention relates generally to a shared floating gatedevice, and more particularly, but not by way of limitation, to a sharedfloating gate device having a high cell density and a method ofmanufacture thereof.

A common floating-gate complementary metal-oxide-semiconductor (CMOS)device can function as an electrically erasable programmable read-onlymemory (EEPROM) device (e.g., a nonvolatile memory storing charges in afloating gate) by using the p-channel field effect transistor (pFET) toavalanche inject hot electrons into a floating gate, and the n-channelfield effect transistor (nFET) to avalanche inject hot holes into thefloating gate. Hot electrons are electrons in the conduction band thathave higher kinetic energy than electrons at thermal equilibrium, andhot holes are holes in the valence band that have higher kinetic energythan holes at thermal equilibrium. Avalanche injection means the hotelectrons or hot holes are generated primarily by an avalanchemultiplication process.

However, since the conventional techniques use SiO₂ as a gate insulator,the energy barrier for injecting electrons into the floating gate isabout 3.1 eV and the energy barrier for injecting holes into thefloating gate is about 5 eV. That is, a hot electron should have kineticenergy of about 3.1 eV and a hot hole should have kinetic energy ofabout 5 eV for efficient injection into a floating gate having SiO₂ asgate insulator.

Moreover, conventional EEPROM cells and memory arrays employcommon-floating-gate series-nFET-pFET devices could have efficientavalanche hot-electron injection in pFET and efficient avalanchehot-hole injection in nFET by using a gate dielectic insulator havinglow energy barrier for hot electron injection and low energy barrier forhot hole injection. However, these conventional EEPROM cells and arrayshave one access transistor for every cell, which takes additional chiparea and reduces cell density. Also, common-floating-gate nFET and pFETare connected in series, thereby lacking symmetry in the way the nFETand pFET operate. Further, some conventional structures have parallelconnections of nFET and pFET such that these structures are denser thanseries connection, but still, higher cell density is desired.

SUMMARY

In an exemplary embodiment, the present invention can provide a sharedfloating gate device, the device including an nFET including an nFETgate dielectric, a pFET including a pFET gate dielectric, and a floatinggate, where the nFET and the pFET are connected in parallel and sharethe floating gate.

Other details and embodiments of the invention will be described below,so that the present contribution to the art can be better appreciated.Nonetheless, the invention is not limited in its application to suchdetails, phraseology, terminology, illustrations and/or arrangements setforth in the description or shown in the drawings. Rather, the inventionis capable of embodiments in addition to those described and of beingpracticed and carried out in various ways that should not be regarded aslimiting.

As such, those skilled in the art will appreciate that the conceptionupon which this disclosure is based, may readily be utilized as a basisfor the designing of other structures, methods and systems for carryingout the several purposes of the present invention. It is important,therefore, that the claims be regarded as including such equivalentconstructions insofar as they do not depart from the spirit and scope ofthe present invention.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the invention will be better understood from the followingdetailed description of the exemplary embodiments of the invention withreference to the drawings, in which:

FIG. 1 exemplarily shows a parallel-connected merged-floating-gatenFET-pFET EEPROM cell 100 according to an embodiment of the presentinvention;

FIG. 2 exemplarily shows an EEPROM array 200 including the cell 100 withone access transistor per wordline according to an embodiment of thepresent invention;

FIG. 3 exemplarily shows an EEPROM array operation of the array 200 withcell (0, 0) using exemplary TABLES 1-2;

FIG. 4A-4B exemplarily depict experimental data with differentdielectric/oxide materials; and

FIG. 5A-5E exemplarily depict a method of manufacture of theparallel-connected merged-floating-gate nFET-pFET EEPROM cell 100.

DETAILED DESCRIPTION

The invention will now be described with reference to FIGS. 1-5E, inwhich like reference numerals refer to like parts throughout. It isemphasized that, according to common practice, the various features ofthe drawings are not necessarily to scale. On the contrary, thedimensions of the various features can be arbitrarily expanded orreduced for clarity.

By way of introduction of the exemplarily parallel-connectedmerged-floating-gate nFET-pFET EEPROM cell 100 depicted in FIG. 1 andthe top view thereof the cell 100 includes a pFET with a reduced energybarrier for hot-electron injection 101, a pFET terminal 102, a commonfloating gate 103, an nFET terminal 104, an nFET with reduced energybarrier for hot-hole injection 105, a common node 106, and an accesstransistor (i.e., nFET) 107. The drain of pFET 102, the source of nFET104, and the drain of access transistor 107 are connected together toform the common node 106.

That is, FIG. 1 exemplarily depicts a shared floating gate deviceincluding an nFET 104 with an nFET gate dielectric and a pFET 102 with apFET gate dielectric where the nFET 104 and pFET 102 are connected inparallel and share a common gate 103 which is floating, to form anelectrically programmable and erasable non-volatile memory device. Thus,the common floating gate (i.e., made of electrically conductingmaterial) is sandwiched between the nFET and the pFET. The nFET gatedielectric and the pFET dielectric are made of different materialsselected so that the difference of the energy barriers for hot-carrierinjection formed by the nFET and pFET dielectric is 1 eV or less.

Moreover, the nFET gate dielectric can include, for example, Y₂O₃, ZrO₂,HfO₂, or the like. The pFET gate dielectric can include, for example,Si₃N₄, Y₂O₃, ZrO₂, HfO₂, or the like.

The access transistor 107 provides electrical access to the common node106.

By the exemplarily embodiment depicted in FIG. 1, with a merged floatinggate, the cell structure can be smaller than the conventional cellstructures. Also, when the access transistor is turned on, a voltageapplied to the pFET terminal induces hot-electron injection in the pFETwhile a voltage applied to the nFET terminal induces hot-hole injectionin the nFET. Thereby, efficient hot electron injection in the pFET andefficient hot hole injection in the nFET can be accomplishedsimultaneously by using high-k gate insulator material such as Si₃N₄,Y₂O₃, ZrO₂, or HfO₂. Further, the cell can include a thin interfacialSiO₂ layer between device body (silicon) and high-k dielectric. Theinterfacial SiO2 can be thin, e.g. <1 nm, to allow efficient tunnelingof hot carriers through it.

FIG. 2 exemplarily depicts an EEPROM array 200 (a 3×3 array) includingthe cell 100 of FIG. 1 described above. The array 200 includes oneaccess transistor per word-line. Each memory cell in an array isconnected to one word line and two bit lines (bit line L and bit lineR). The cell array 200 can be built using the same standard CMOS logicprocess used to build logic circuits. Alternatively, the cell array canbe built by process that is different or separate from the process usedto build logic circuits. For example, the array can be built using SOI(silicon on insulator) or TFT (thin-film transistor) process while thelogic circuits are built using standard bulk CMOS process.

FIG. 3 exemplarily depicts the EEPROM array 200 operation (i.e.,read/write) with cell (0,0) as an example. (please use the table below,where in Read, both B0L and B0R are applied with 1.5V)

TABLE 1 For cell (0, 0) being selected WL0 B0L B0R Write “1” 1.5 V   0 V3.0 V Write “0” 1.5 V 3.0 V   0 V Read 1.5 V 1.5 V 1.5 V

Using the values of TABLE 1, the common floating gate is programmed byavalanche hot-hole injection in the nFET (writing “1”) and erased byavalanche hot-electron injection in the pFET (writing “0”). At standby,WL0=B0L=B0R=0 V. A word-line is selected with WL0=1.5 V which turns onthe nFET access transistor. In writing “1”, Vds=3.0 V across thefloating-gate nFET, thereby causing hot-hole injection in the nFET. Inwriting “0”, Vds=3.0 V across the pFET, thereby causing hot-electroninjection in the pFET. In reading the nFET, Vds=1.5 V across both thenFET and the pFET.

Using the values from TABLE 1 for the selected cell (0, 0), anon-selected cell on same word-line as cell (0,) has Vds=0 V across itsnFET and pFET in writing “1”. That is, a non-selected cell on the sameword-line as cell (0, 0) is not disturbed in writing “1”. Similarly inwriting “0”, Vds=0 V across the nFET and pFET of a non-selected cell onthe same word-line as cell (0, 0), and hence the non-selected cell isnot disturbed either. For a non-selected cell on the same bitline as theselected cell (0, 0), it common node is floating during writing “1” andwriting “0”. The voltage difference between the bitline B0L and thebitline B0R is divided between the nFET and the pFET. The net result isthat Vds across either the nFET or the pFET is not large enough to causehot-carrier injection. That is, a non-selected cell on the sameword-line as the selected cell (0, 0), or on the same bit-line as theselected cell (0, 0), is not disturbed by the operation of the selectedcell (0, 0).

Thus, the cell 100 and array 200 can provide for a silicon-on-insulator(SOI) EEPROM chip with both an EEPRPM array and peripheral logiccircuits built on same SOI substrate, an EEPROM chip with EEPROM arraybuilt on thin polycrystalline silicon films on insulator and peripherallogic circuits built on bulk silicon substrate, and a bulk siliconEEPROM chip with both EEPROM array and peripheral logic circuits builton same bulk silicon substrate.

FIGS. 4A-B exemplarily depict experimental values of materials and theefficiency of the hot-electron injection in pFET having HfO₂ as gateinsulator. As depicted, in FIG. 4A, with an SiO₂ gate insulator, thereis a negligible avalanche hot-electron injection at Vds<2.5 V. Incontrast, in FIG. 4B, with HfO₂ as a gate insulator, there is anappreciable avalanche hot-electron injection starting at Vds>1.5 V.Further, for programming with 1E12/cm² electron injection, the SOI pFETwith HfO₂ gate insulator can be programmed in less than 10 ns at Vds=2.5V.

FIGS. 5A-5E exemplarily depict a method of manufacture of the cell 100according to an embodiment of the invention. As depicted in FIG. 5A, asilicon on insulator (SOI) substrate 5002 is provided, followed byshallow trench isolation (STI) 501 formation for device isolation (e.g.,photolithography, etch, oxide deposition, planarization). In FIG. 5B,the nFET (n+/p/n+) 507 and pFET (p+/n/p+) 506 are formed withphotolithography and ion implantation. In FIG. 5C, the STI 501 isselectively removed by photolithography and etching to thereafter befilled oxide. In FIG. 5D, a gate dielectric 510 and poly-Si is depositedto form the floating gate 511. In FIG. 5E, dielectric deposition iscontinued and contacts vias are formed to n+S/D (source/drain) of nFETand p+pFET, and metallization is performed.

Thereby, the invention described herein can provide an improvement inefficiency of avalanche hot-hole injection in an nFET, an improvement inhot-carrier injection efficiency by reducing the energy barrier forinjection, efficient avalanche hot-electron injection in a pFET by usingSi₃N₄, Y₂O₃, ZrO₂, or HfO₂ for gate dielectric, and efficient avalanchehot-hole injection in an nFET by using Si₃N₄, Y₂O₃, ZrO₂, or HfO₂ forgate dielectric.

The descriptions of the various embodiments of the present inventionhave been presented for purposes of illustration, but are not intendedto be exhaustive or limited to the embodiments disclosed. Manymodifications and variations will be apparent to those of ordinary skillin the art without departing from the scope and spirit of the describedembodiments. The terminology used herein was chosen to best explain theprinciples of the embodiments, the practical application or technicalimprovement over technologies found in the marketplace, or to enableothers of ordinary skill in the art to understand the embodimentsdisclosed herein.

Further, Applicant's intent is to encompass the equivalents of all claimelements, and no amendment to any claim of the present applicationshould be construed as a disclaimer of any interest in or right to anequivalent of any element or feature of the amended claim.

What is claimed is:
 1. A shared floating gate device, the devicecomprising: an nFET; a pFET comprising a different material than that ofthe nFET; and a floating gate.
 2. The device of claim 1, wherein thenFET and the pFET share the floating gate to form an electricallyerasable and programmable non-volatile memory device.
 3. The device ofclaim 1, wherein the nFET includes an nFET gate dielectric, wherein thepFET includes a pFET gate dielectric, and wherein the pFET gatedielectric comprises different materials.
 4. The device of claim 3,wherein the different materials are selected so that a difference ofenergy barriers for a hot-carrier injection formed by the nFET gatedielectric and the pFET gate dielectric is 1 eV or less.
 5. The deviceof claim 1, wherein the nFET comprises one of: Y₂O₃; ZrO₂; and HfO₂. 7.The device of claim 1, wherein the pFET comprises one of: Si₃N₄; Y₂O₃;ZrO₂; and HfO₂.
 8. An electrically erasable programmable read-onlymemory (EEPROM) cell, the cell comprising: an nFET including a source; apFET including a drain and comprising a different material than that ofthe nFET; a floating gate; and an nFET access transistor including adrain connected to the source of the nFET and the drain of the pFET. 9.The cell of claim 8, wherein the nFET and the pFET share the floatinggate to form an electrically programmable and erasable non-volatilememory device.
 10. The cell of claim 8, wherein the nFET includes annFET gate dielectric, wherein the pFET includes a pFET gate dielectric,and wherein the pFET gate dielectric comprises different materials. 11.The cell of claim 10, wherein the different materials are selected sothat a difference of energy barriers for a hot-carrier injection formedby the nFET gate dielectric and pFET gate dielectric is 1 eV or less.12. The cell of claim 8, wherein the nFET comprises one of: Y₂O₃; ZrO₂;and HfO₂.
 13. The cell of claim 8, wherein the pFET comprises one of:Si₃N₄; Y₂O₃; ZrO₂; and HfO₂.
 14. An array structure, comprising: aplurality of cells, each cell including: an nFET including a source; apFET including a drain and comprising a different material than that ofthe nFET; a floating gate; and an nFET access transistor including adrain connected to the source of the nFET and the drain of the pFET. 15.The array structure of claim 14, further comprising one nFET accesstransistor per word-line.
 16. The array structure of claim 14, furthercomprising one bit-line per pFET access transistor.
 17. The arraystructure of claim 14, further comprising word-line and two bit-linesper each cell, said word-line being connected to the gate of the accesstransistor, one of said bit-lines being connected to the source of thepFET and the other one of said bit-lines being connected to the drain ofnFET.
 18. The array structure of claim 14, further comprising peripherallogic circuits, wherein the plurality of cells and the peripheral logiccircuits are built on a same substrate.
 19. The array structure of claim14, further comprising peripheral logic circuits, wherein the pluralityof cells is built on a polycrystalline silicon film-on-insulator and theperipheral logic circuits are built on a bulk silicon substrate.
 20. Thearray structure of claim 14, further comprising peripheral logiccircuits, wherein the plurality of cells and the peripheral logiccircuits are built on a same bulk silicon substrate.